Ultra-wide range vacuum measurement

VersaTorr BVT100 Series vacuum gauges offer best-in-class performance and have established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades. Based on cutting edge MEMS (Microelectromechanical Systems) sensor technology, the design of VersaTorr BVT100 Series vacuum gauges is combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithms. Together with precision automated manufacturing and calibration processes, these elements in combination provide a unique product capable of uncompromised measurement performance. The well-known gas dependency in the rough vacuum range of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control of vacuum system venting processes and can prevent over-pressurization of the vacuum system.