View Topas GmbH on TEKEN44The fog generator is primarily used for the initial acceptance and routine inspections of cleanroom systems in accordance with the standard series ISO 14644 or guideline VDI 2083-3 in order to detect leaks in the transition areas of cleanroom elements, to prove the presence of laminar displacement flow or to visualise the overpressure level of cleanrooms.
ANSI/IEST/ISO 14644-1
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
ANSI/IEST/ISO 14644-2
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ANSI/IEST/ISO 14644-3
Cleanrooms and associated controlled environments - Part 3: Test methods
VDI 2083 Blatt 3
Cleanroom technology - Metrology
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