Brooks Instrument, LLC.

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package. Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation. The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.

Establish new standards with the VersaTorr BVT200/225 Series Pirani transducer. This is an all-in-one wide range measurement solution for a broad selection of vacuum applications. It differentiates from any other vacuum gauges by offering an overall cost-effective gas independent measurement from 5.0E-3 to 1333 mbar in combination with measurement down to 1E-6 mbar by use of the heat-loss principle. In vacuum applications where the gas composition or type can change, traditional gas dependent Pirani gauges will result in measurement deviation from the actual pressure. The Tri- Sensor transducer uses a precision capacitance diaphragm gauge (CDG) sensor that eliminates the gas dependency and provides accurate measurements also when the gas properties change. The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides a novel automatic zero adjustment of the capacitance manometer that eliminates the common needs for manual zero adjustment of traditional capacitance diaphragm gauges.

VersaTorr BVT100 Series vacuum gauges offer best-in-class performance and have established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades. Based on cutting edge MEMS (Microelectromechanical Systems) sensor technology, the design of VersaTorr BVT100 Series vacuum gauges is combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithms. Together with precision automated manufacturing and calibration processes, these elements in combination provide a unique product capable of uncompromised measurement performance. The well-known gas dependency in the rough vacuum range of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control of vacuum system venting processes and can prevent over-pressurization of the vacuum system.

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance. The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

Features Available for process ranges from 10 Torr to 1000 Torr Two accuracy levels available: 0.25% or 0.50% of reading (optional) Exceptional performance over a wide range of operating temperatures 40% smaller than traditional unheated capacitance manometers All-welded construction and Inconel® wetted surfaces

Features Stainless steel movement providing precision performance 316L stainless steel wetted parts Gauges welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines

Features Configurable to retro-fit GT1000, GT130x and Full-View® models 316 stainless steel frame, polycarbonate safety shield and 316/316L dual certified stainless steel process fittings Process connections can be rotated 360°, 180° viewing window, panel or wall mount option Alarms for high and low-flow (optional for all flow ranges); Purchase at time of order or add it in the field Choose from multiple accuracy levels Flanged or threaded connections available (horizontal and vertical) Adjustable scale to compensate for process variation

Need reliable, durable flow measurement in high-pressure, high-temperature or hazardous process settings? The MT3750 metal tube variable area low flow meter from Brooks Instrument is your hard-working answer. Constructed from high-strength steel, the MT3750 Series VA low flow meter features a compact design and multiple threaded and flange connection options to make it easier to install and integrate into existing plants, as well as a cost-effective replacement for glass tube flow meters. Certified explosion proof, our low flow liquid flow meters also offer optional transmitters or inductive alarms for more advanced flow measurement and process data capture operations.

Features Flow meter offers extremely wide range of flow ratings - supports very low to very high flow rates Temperature ratings from -325°F to 788°F (-198°C to 420°C) Pressure ratings up to 6,000 psi (standard products) and up to 20,000 psi (custom models) Enhanced LCD display with local operator interface (optional) High-/low-flow alarm functions that meet SIL 2 requirements 316SS stainless steel flameproof housing meets ATEX gas group IIC/Class 1 Div 1 hazardous area rating Selection of corrosion resistant wetted materials and indicator housing to fit demanding application needs Gasket sealing surface meets ASME requirements, no special gaskets required Flow transmitters are available with HART® 7 or FOUNDATIONTM Fieldbus capability and have worldwide approvals

Features IP66 rated hardened enclosure Wide range of full scale flows - from 0.003 up to 2500 lpm (9000 lpm for meters) Suitable for a broad range of temperature and pressure conditions Industry-leading thermal flow measurement sensor technology delivers excellent accuracy Broad array of available communication options now includes EtherNetIP™ and PROFINET which feature a web-based interface that lets you easily configure network settings. Programmable multi-gas/multi-range capabilities Advanced self-test routines and an independent diagnostic service port lets users troubleshoot or change flow conditions without removing the MFC from service

Features Long-term zero stability of ‹ 0.2% full scale per year Excellent accuracy backed by traceable calibration standards. Wide range of flow ratings - from 0.003 up to 2500 lpm Highest pressure ratings - up to 1500 psi/100 bar (optional: 4500 psi/310 bar) Programmable multi-gas/multi-range capabilities Independent & easily accessible diagnostic/service port Broad array of available communication options now includes EtherNetIP™, ODVA certified, PROFINET, which feature a web-based interface that lets you easily configure network settings. and ODVA certified DeviceNet. Modular design is easy-to-service at the factory or in the field Biotech Options Packages: Enhance the SLA5800 with features designed specifically to improve bioprocessing performance. Learn more about SLA Biotech Options Packages Benefits Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership ISO/IEC 17025 certification and calibration available with flow accuracy of ±0.6% of SP Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points Choose one device platform for different gases and flow ranges Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation Durable, robust metal top lid prevents damage during installation EtherNet|P™ and PROFINET permit multiple, additional diagnostics beyond those provided by the mass flow controller alone, giving users rich, real-time system information